| 摘要 |
A leak test method includes: reducing first pressure in an inspection space in a work and second pressure in a space in a master chamber; humidifying the inspection space in the work; and detecting a change in differential pressure between the inspection space in the work and the space in the master chamber, while the inspection space in the work is in a water- vapor saturated state. Also, in this leak test method, a leak in the inspection space in the work is detected from the change in the differential pressure. |
