发明名称 |
Method and apparatus for depositing LED organic film |
摘要 |
In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle. |
申请公布号 |
US8128753(B2) |
申请公布日期 |
2012.03.06 |
申请号 |
US20050282472 |
申请日期 |
2005.11.21 |
申请人 |
BULOVIC VLADIMIR;BALDO MARC A.;SCHMIDT MARTIN A.;LEBLANC VALERIE;CHEN JIANGLONG;MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
BULOVIC VLADIMIR;BALDO MARC A.;SCHMIDT MARTIN A.;LEBLANC VALERIE;CHEN JIANGLONG |
分类号 |
C23C14/12 |
主分类号 |
C23C14/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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