METHOD FOR MANUFACTURING PLANAR THIN FILM THERMOELECTRIC MODULE AND PLANAR THIN FILM THERMOELECTRIC MODULE MANUFACTURED BY THE SAME

摘要

PURPOSE: A method for manufacturing planar thin film thermoelectric module and a planar thin film thermoelectric module manufactured by the same are provided to minimize the size of a thermoelectric module by depositing a thin film thermoelectric semiconductor on the top and bottom of a silicon substrate. CONSTITUTION: A first thin film layer(120) and a second thin film layer(130) are formed on the top side and bottom side of a silicon substrate(110). A second thin film layer formed on the lower-part of the silicon substrate is patterned and a plurality of first groove portions are formed. A silicon substrate exposed by the first groove portion is etched and a hole portion is formed. A plurality of P-type semiconductors(140) and N-type semiconductors(150) are deposited in the top side of the first thin film layer by turns. An electrode(160) is deposited on both ends in the longitudinal direction of the P-type semiconductor and N-type semiconductor.