发明名称 |
Method for depositing electrically insulating layers |
摘要 |
Method for producing layers of low conductivity, especially insulating layers, on at least one workpiece by vacuum coating, wherein an electrical arc discharge is operated between at least one anode and one cathode of an arc source in an atmosphere containing reactive gas, and only a small external magnetic field or none at all is produced at the surface of a target electrically connected to the cathode essentially perpendicular to the target surface to assist the vaporization process, the degree of recoating of the surface by other coating sources being less than 10%, and the magnetic field is generated by a magnet system that comprises at least one axially polarized coil with a geometry similar in size to the target. |
申请公布号 |
AU2007276186(B2) |
申请公布日期 |
2012.03.01 |
申请号 |
AU20070276186 |
申请日期 |
2007.07.12 |
申请人 |
OERLIKON TRADING AG, TRUEBBACH |
发明人 |
RAMM, JUERGEN;WIDRIG, BENO;WOHLRAB, CHRISTIAN |
分类号 |
C23C14/32;C23C14/08 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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