发明名称 INTERFERENCE FILTER, OPTICAL MODULE AND ANALYZER
摘要 <P>PROBLEM TO BE SOLVED: To provide an interference filter which suppresses the deterioration of performance. <P>SOLUTION: The interference filter 5 includes two reflection films 56 and 57 opposed to each other through a gap G, and substrates 51 and 52 which support the reflection films 56 and 57. The reflection films 56 and 57 include pure silver films 561 and 571 and silver alloy films 562 and 572. The substrates 51 and 52 are provided with the pure silver films 561 and 571 and the silver alloy films 562 and 572, in the order from the sides of the substrates 51 and 52. The silver alloy films 562 and 572 are Ag-Sm-Cu alloy films containing silver (Ag), samarium (Sm) and copper (Cu) or Ag-Bi-Nd alloy films containing silver (Ag), bismuth (Bi) and neodymium (Nd). <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012042651(A) 申请公布日期 2012.03.01
申请号 JP20100182939 申请日期 2010.08.18
申请人 SEIKO EPSON CORP 发明人 KITAHARA KOJI;SHINTO SUSUMU
分类号 G02B5/28;C22C5/06;C23C14/06;C23C14/14;G02B5/26 主分类号 G02B5/28
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