| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning apparatus and method which can prevent readhesion of dirt staying on the liquid surface of a cleaning liquid to an object to be cleaned when the object to be cleaned is taken out from the cleaning liquid. <P>SOLUTION: The liquid surface of the cleaning liquid 3 is divided by a partition plate 4 into a region 3A into which the object to be cleaned is charged and a region 3B from which the object to be cleaned is taken out. The object to be cleaned 5 retained by a carrying unit 6 is made to move downward from above the region 3A to be immersed into the cleaning liquid 3, and cleaned by jetting fine bubbles by a fine bubble generator 7, and then moved to the region 3B through the lower part of a cleaning tank 2 to take out the object to be cleaned 5 from the region 3B. As a result, dirt (oil components) peeled off from the object to be cleaned 5 rises to the liquid surface of the region 3A and stays there to maintain the liquid surface of the region 3B in a clean state, thereby preventing the readhesion of the dirt staying on the liquid surface of the cleaning liquid 3 to the object to be cleaned 5 when taking out the object to be cleaned 5 from the cleaning liquid 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
