| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost defect inspection device. <P>SOLUTION: The defect inspection device of an embodiment includes: detection means 40 which detects a plurality of defects generated on a substrate surface or a film surface in a manufacturing process; clustering means 41 which classifies the plurality of defects detected by the detection means into defect groups on the basis of their positions; identification information giving means 42 which gives identification information to the defect groups and the defects; and storage means 34 which holds position information of the defect groups and the defects together with the identification information given by the identification information giving means. Furthermore, the defect inspection device of the embodiment includes: grouping means 42 which draws a line between two selected from the defect groups and the defects and, if the difference of inclinations of the lines is within a prescribed range, determines that the defect groups and the defects on these lines belong to the same group to give the same label to these defect groups and defects and holds the label in the storage means together with their position information and identification information; and deletion means 42 which keeps position information about two or more defect groups or defects out of defect groups and defects belonging to each group and deletes position information about the other defect groups and defects in the group from the storage means. <P>COPYRIGHT: (C)2012,JPO&INPIT |
