发明名称 LARGE SCALE METROLOGY APPARATUS AND METHOD
摘要 A metrology system that uses a plurality of photo-detecting targets positioned on the objects to be assembled, a plurality of rotating photo-emitting heads, a master signal generator that generates a reference RF signal, and a signal processor that determines the position of each of the targets from signals generated by each target in response to the photo-emitting heads. During operation, the reference RF signal is broadcast to the rotating photo-emitting heads and the photo-detecting targets. The RF signal is used to determine the azimuth of the heads relative to a zero reference position to a high degree of accuracy.
申请公布号 US2012050726(A1) 申请公布日期 2012.03.01
申请号 US201113214717 申请日期 2011.08.22
申请人 NOVAK W. THOMAS;SMITH DANIEL G.;HOLLAND LLOYD;NIKON CORPORATION 发明人 NOVAK W. THOMAS;SMITH DANIEL G.;HOLLAND LLOYD
分类号 G01J1/00 主分类号 G01J1/00
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