| 摘要 |
<P>PROBLEM TO BE SOLVED: To make the thickness of a liquid material applied to a substrate more uniform. <P>SOLUTION: The coating apparatus comprises: an applying part having a nozzle which discharges a liquid material to a predetermined discharging region; a substrate transport part which transports the substrate while floating the substrate so that the substrate passes through the discharging region; and a detecting part, provided in the substrate transport part, for detecting the floating height of the substrate in the discharging region. <P>COPYRIGHT: (C)2012,JPO&INPIT |
