发明名称 A loading apparatus having a suction-hold mechanism.
摘要 <p>A suction head having plural suction pads on both surfaces thereof is used to transfer a substrate of a compack disk and the like from one position to another for loading. The suction head is connected to a rotating shaft rotatable and movable in a vertical direction. The rotating shaft causes the suction head to turn over and move in an up-and-down direction. The suction pads on both surfaces of the suction head are connected to a pair of flexible pipes which are wound around the shaft and connected respectively to exhaust systems. Thus, the suction pads capture and release the substrate by suction control so as to load the same at a prescribed position. Further, a shock absorber is provided to relieve a shock upon the stoppage of the suction head in vertical and rotational reciprocating motions.</p>
申请公布号 EP0487848(A1) 申请公布日期 1992.06.03
申请号 EP19910115580 申请日期 1991.09.13
申请人 KABUSHIKI KAISHA TOKUDA SEISAKUSHO;SONY CORPORATION 发明人 KATO, NAOKI;KONOSHIMA, EIJI;KONOKIRI, KYOJI;IKEDA, JIRO
分类号 B65H7/16;B65G47/91;B65H5/14;C23C14/50;C23C14/56;G11B7/26;H01L21/677 主分类号 B65H7/16
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