| 摘要 |
PROBLEM TO BE SOLVED: To provide an alkaline development method for reducing line width dispersion, which is produced when developing is stopped with hardly a time difference between the front end part and the rear end part of a glass substrate 11 during water rinsing, after consecutive developing which is carried out through conveyance via a plurality of developing tanks 20, in the longitudinal direction of the glass substrate. SOLUTION: A pH value of an alkaline developer jetted to the glass substrate 11 is maximized in a developing tank, in the center of a plurality of serial developing tanks, and the pH value is reduced gradually step by step so that it is brought close to a neutral value, toward a developing tank in the front end part adjacent to a convey-in device and directed toward a developing tank in the rear-end part which is adjacent to a carry-out device. COPYRIGHT: (C)2009,JPO&INPIT |
