发明名称 METHOD OF FORMING FILM, HEAT TRANSFER MEMBER, POWER MODULE, INVERTER FOR VEHICLE AND VEHICLE
摘要 <p>There is provided a film forming method capable of enhancing adhesion efficiency of a metal powder by use of a low-pressure compressed gas even in the case of spraying the metal powder remaining in a solid-phase state to a substrate, to form a film, the method being a film forming method of spraying a metal powder p in a solid-phase state to a surface 11a of a substrate 11 along with a compressed gas, to form a film 12 of the metal powder p on the surface 11a of the substrate 11, wherein a powder, which at least contains a powder for film formation having an apparent density of 1.4 to 2.0 g/cm3 and an average grain size of not larger than 25μm, is used as the metal powder p.</p>
申请公布号 KR101115865(B1) 申请公布日期 2012.02.28
申请号 KR20097006856 申请日期 2008.06.11
申请人 发明人
分类号 C23C24/04;H01L23/36;H01L25/07 主分类号 C23C24/04
代理机构 代理人
主权项
地址