| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a Ti-based film removing agent of which influence on a base material is reduced, especially the Ti-based film removing agent capable of inhibiting elution of cobalt even when the base material is an ultra hard material containing the cobalt as a binder phase thereby solving the problem of film peeling of the Ti-based film of re-coating caused when a conventional removing agent is used. <P>SOLUTION: This Ti-based film removing agent includes aqueous solution containing (A) 5-20 mass% of hydrogen chloride, (B) 0.5-10 mass% of at least one salt fluoride compound selected from ammonium fluoride, potassium fluoride, sodium fluoride and lithium fluoride, and (C) 1-10 mass% of compound expressed in formula (1) : HS-X1-Y or salt thereof, wherein X1 represents an alkylene group that may be substituted with a carboxyl group having 1-4 carbon atoms 1-4, and Y represents the carboxyl group or an amino group. <P>COPYRIGHT: (C)2012,JPO&INPIT |
