LASER LIFT-OFF APPARATUS HAVING HEATER

摘要

PURPOSE: A laser lift-off apparatus having a heater is provided to easily focus a laser beam by heating a growth substrate by using the heater and alleviating the bending of a substrate and to prevent cracks of epitaxial layers. CONSTITUTION: A laser generator(100) emits a laser beam. A mirror(110) changes direction of the laser beam. A stage(200) supports a work piece(300). The work piece comprises a first substrate, epitaxial layers which are grown on the first substrate, and a second substrate bonded to the epitaxial layers. A optical lens(120) focuses the laser beam which is entered in the work piece. The stage comprises a main stage to be possible to move. A heater heats the work piece and is installed on the main stage. An insulator is arranged between the main stage and the heater.