| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a surface adhesive type micro electro mechanical system oscillator and a structure of the same. <P>SOLUTION: A manufacturing method of a surface adhesive type micro electro mechanical system oscillator and a structure of the same comprises: 1. lot-producing on a glass wafer by a micro electro mechanical system; 2. conforming to an integrated circuit element completely; 3. conforming to other electronic dies to pack into the same integrated circuit, and reducing the usage of a single power element effectively to reduce the production cost massively; 4. reducing overapplication of glue or lack of application of glue and decreasing the amount of defectives by improving production accuracy by specific glue application region design. <P>COPYRIGHT: (C)2012,JPO&INPIT |
