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发明名称
METHOD OF DRY-ETCHING PLATINUM
摘要
申请公布号
JPH10163179(A)
申请公布日期
1998.06.19
申请号
JP19960333140
申请日期
1996.11.29
申请人
ANELVA CORP
发明人
MASHITA KIMIKO
分类号
C23F4/00;H01L21/28;H01L21/302;H01L21/3065;H01L21/3205;H01L23/52;(IPC1-7):H01L21/306;H01L21/320
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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