Method for manufacturing a multilayer structure with trimming by thermomechanical effects,申请号EP20110151327-传众专利搜索

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发明名称	Method for manufacturing a multilayer structure with trimming by thermomechanical effects
摘要
申请公布号	EP2363879(A3)	申请公布日期	2012.02.22
申请号	EP20110151327	申请日期	2011.01.18
申请人	S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES	发明人	VAUFREDAZ, ALEXANDRE;MOLINARI, SEBASTIEN
分类号	H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
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