发明名称
摘要 <p>The invention provides a peeling jig of a dust-proof film assembly and a peeling method. The peeling jig of the dust-proof film assembly comprises a fixing member for a mask and an adhesive layer for the dust-proof film assembly. The relative position of the mask and the dust-proof film assembly is fixed and then the adhesive layer is pulled out and removed. According to the invention, a dust-proof film assembly attached to a mask is removed simply and safely.</p>
申请公布号 JP4879308(B2) 申请公布日期 2012.02.22
申请号 JP20090248548 申请日期 2009.10.29
申请人 发明人
分类号 G03F1/62;G03F1/64;H01L21/027 主分类号 G03F1/62
代理机构 代理人
主权项
地址