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发明名称
METHOD OF PATTERNING SEMICONDUCTOR SUBSTRATE AND METHOD OF FORMING SIO2 PATTERN
摘要
申请公布号
JPH11251285(A)
申请公布日期
1999.09.17
申请号
JP19980053718
申请日期
1998.03.05
申请人
OKI ELECTRIC IND CO LTD
发明人
KOBAYASHI MASAO
分类号
H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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