发明名称 |
In-situ cleaning assembly |
摘要 |
A cleaning chamber is provided. The cleaning chamber includes a base portion housing a chuck and a lid affixed to the base portion. A support assembly is linked to the lid and the support assembly includes a top plate spaced apart from a bottom plate, the top plate has a plurality of openings defined therethrough and the bottom plate has a plurality of openings defined therethrough. The cleaning chamber includes a plurality of cups extending through corresponding pairs of the plurality of openings of the top plate and the bottom plate. The plurality of cups is configured to seal against a surface of a substrate, wherein each cup of the plurality of cups is independently supported by the bottom plate. |
申请公布号 |
US8627835(B2) |
申请公布日期 |
2014.01.14 |
申请号 |
US201113086327 |
申请日期 |
2011.04.13 |
申请人 |
LIM GREGORY;FRANCIS AARON;WILLIAMS KENNETH;INTERMOLECULAR, INC. |
发明人 |
LIM GREGORY;FRANCIS AARON;WILLIAMS KENNETH |
分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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