发明名称 Sample holder for parallel lapping tool and method of using
摘要 The present invention discloses a sample holder for a miniature device for use in a parallel lapping tool that is equipped with a hollow-centered sample holder assembly such that the condition of the sample being prepared can be continuously monitored from either the top side or the bottom side of the holder, and at least three adjusting screws that are used to adjust a plane of lapping to be the same as the plane of interest in said miniature device to be observed such that once the plane is obtained, only the sample displacement knob situated at the center of the holder needs to be adjusted to further advance the sample for removal of more material.
申请公布号 US6007409(A) 申请公布日期 1999.12.28
申请号 US19980057266 申请日期 1998.04.08
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHUNG, LEE
分类号 B24B37/04;B24B41/06;(IPC1-7):B24B37/04 主分类号 B24B37/04
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