| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently remove organic matter causing problems in an atmosphere in a clean room of semiconductor and LCD manufacturing for long term, with little pressure loss. <P>SOLUTION: This air cleaning filter is provided with adsorption sheets 10, 11 having at least one of diatomaceous earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, activated clay, activated bentonite, synthetic zeolite, and activated carbon. A thickness of the sheets 10, 11 is 0.4 mm or less, and total volume of fine holes with diameters 20Åor less measured by a gas adsorption method using argon gas, is 46 cc/m<SP>2</SP>or more per unit area of the sheet 10, 11. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
