| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring instrument capable of measuring two or more measured surfaces with high accuracy in a short time without causing 'a setting error' caused by setup changing work. SOLUTION: This instrument is structured to measure reference balls 9 in a noncontacting manner by using a measurement optical head 5 comprising an interferometer as a position measuring means for measuring the positions of the reference balls 9.
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