| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for supplying a heat treatment atmospheric gas, for preparing a non-oxidative reducing atmospheric gas containing substantially no oxidative gas and a small amount of reducing gas by a simple and inexpensive structure and method without using an expensive catalyst, and supplying the gas to a heat treatment furnace. <P>SOLUTION: The apparatus for supplying a heat treatment atmospheric gas includes a nitrogen generating device 1, a nitrogen supply amount control means, a hydrocarbon supplying device 2, a first hydrocarbon supply amount control means, and a low temperature reaction tank 3, wherein a supply amount of nitrogen, a supply amount of hydrocarbon gas and reaction temperature in the low temperature reaction tank are controlled as a primary processing. The apparatus also includes a second hydrocarbon supply amount control means, wherein a supply amount of hydrocarbon gas is controlled as a secondary processing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
