| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an air cleaning system that can remove a silanol compound such as trimethyl silanol at a high removal rate. <P>SOLUTION: The air cleaning system includes: a dehumidifier 13; an internal chemical filter 14; and a temperature control humidity controller 15. Air containing the silanol compound is filtered by the internal chemical filter 14 after relative humidity of the air is lowered to be 33% or less by the dehumidifier 13. The silanol compound is dimerized under the low-humidity environment to be removed by the internal chemical filter 14 at a high removal rate. The temperature and humidity controller 15 allows the air having passed through the internal chemical filter 14 to return to the normal relative humidity. <P>COPYRIGHT: (C)2012,JPO&INPIT |
