发明名称 |
PIEZOELECTRIC THIN FILM, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT |
摘要 |
The present invention provides a piezoelectric thin film comprising an electrode film with a (001) orientation, a (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film with a (001) orientation (x represents not less than 0.29 and not more than 0.4) and a (Na,Bi)TiO3—BaTiO3 piezoelectric layer, the electrode film, the (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film, and the (Na,Bi)TiO3—BaTiO3 piezoelectric layer being laminated in this order. The lead-free piezoelectric thin film of the present invention has low dielectric loss and high piezoelectric performance.
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申请公布号 |
US2012038714(A1) |
申请公布日期 |
2012.02.16 |
申请号 |
US201113280000 |
申请日期 |
2011.10.24 |
申请人 |
HARIGAI TAKAKIYO;TANAKA YOSHIAKI;ADACHI HIDEAKI;FUJII EIJI;PANASONIC CORPORATION |
发明人 |
HARIGAI TAKAKIYO;TANAKA YOSHIAKI;ADACHI HIDEAKI;FUJII EIJI |
分类号 |
H01L41/18;B41J2/045;G01C19/56;H02N2/18 |
主分类号 |
H01L41/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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