| 摘要 |
A coating apparatus includes an atomization chamber, a reaction chamber having an opening, an outputting chamber successively connected with each other. The coating apparatus also includes a gate, a concentration sensor and a control device. The atomization chamber atomizes a precursor. The reaction chamber receives a reactive gas for reacting with the atomized precursor. The gate is movable between a first position where the opening is closed by the gate and a second position where the opening is disengaged from the gate. The concentration sensor is located in the reaction chamber and senses a concentration of a product obtained in the reaction chamber. The control device is electrically connected with the concentration sensor, configured for comparing the concentration sensed by the concentration sensor with a prestored concentration value, and controlling the gate to move to the second position if the sensed product concentration is equal to the prestored concentration value. |
