摘要 |
A test apparatus is described that can be useful as test equipment in various applications, including for example testing a semiconductor device. The test apparatus has a circuit board, a probe card, and a card holder. The circuit board includes a contact layout that electrically connects with a probe card at one portion and electrically connects with a probe card holder at another portion. The probe card has probes for electrically contacting a device to be tested, and has a contact configuration that electrically connects with the circuit board. The apparatus allows for electrical signals to be sent to and from the probe card, through the probe card holder and circuit board, in testing a device such as for example a semiconductor device. The circuit board and probe card holder have an attachment structure, configured for example as a notch and catch finger attachment arrangement. |