| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for detecting a bias alarm whereby a current waveform and a voltage waveform when the bias alarm is generated can be accurately confirmed without using a digital oscilloscope, etc., in a TBT apparatus. SOLUTION: An AD conversion circuit 15 converts current/voltage signals to digital data according to a trigger signal from a trigger output circuit 14. An address output circuit 16 calculates a storage place for the digital data in accordance with an address increment signal from the trigger output circuit 14. Thereafter, a waveform memory 17 stores the digital data to the storage place. When each level of the current/voltage signals exceeds a specified level, a current alarm detection circuit 13a and a voltage alarm detection circuit 13b output alarm signals to the trigger output circuit 14. The trigger output circuit 14 stops outputting the trigger signal and the address increment signal in accordance with the alarm signals.
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