发明名称 |
SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the drain current collapse. <P>SOLUTION: A semiconductor device has: a source electrode 20, a gate electrode 24, and a drain electrode 22 formed on a nitride semiconductor layer 19; a silicon nitride film 26 formed on the nitride semiconductor layer in a state contacted with it; and an organic insulation film 32 provided in a state contacted with an upper surface of the silicon nitride film between the gate electrode and the drain electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012033578(A) |
申请公布日期 |
2012.02.16 |
申请号 |
JP20100169844 |
申请日期 |
2010.07.28 |
申请人 |
SUMITOMO ELECTRIC DEVICE INNOVATIONS INC |
发明人 |
NISHI SHINKO |
分类号 |
H01L21/338;H01L29/778;H01L29/812 |
主分类号 |
H01L21/338 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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