发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To suppress the drain current collapse. <P>SOLUTION: A semiconductor device has: a source electrode 20, a gate electrode 24, and a drain electrode 22 formed on a nitride semiconductor layer 19; a silicon nitride film 26 formed on the nitride semiconductor layer in a state contacted with it; and an organic insulation film 32 provided in a state contacted with an upper surface of the silicon nitride film between the gate electrode and the drain electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012033578(A) 申请公布日期 2012.02.16
申请号 JP20100169844 申请日期 2010.07.28
申请人 SUMITOMO ELECTRIC DEVICE INNOVATIONS INC 发明人 NISHI SHINKO
分类号 H01L21/338;H01L29/778;H01L29/812 主分类号 H01L21/338
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