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发明名称
METHOD FOR MANUFACTURING POLYMER RESIST PATTERN
摘要
申请公布号
KR20050111952(A)
申请公布日期
2005.11.29
申请号
KR20040036886
申请日期
2004.05.24
申请人
LG ELECTRONICS INC.
发明人
AHN, SEH WON;LEE, KI DONG;LEE, SUNG EUN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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