Particle removing apparatus in laser machining, laser scribing apparatus and method

摘要

PURPOSE: A particle removing apparatus in laser machining and a laser scribing apparatus and method are provided to effectively remove scrap, dust, and gas produced during laser pattering of a substrate by sucking dust and spraying gas to a part of a patterned film. CONSTITUTION: A laser scribing apparatus comprises a laser scriber, a sucking unit(170), and a gas ejector(180). The laser scriber irradiates laser from one side of a work piece to pattern a layer formed on the other side of the work piece. The sucking unit removes dust produced during patterning of the work piece from the other side of the work piece. The gas ejector ejects gas to the processed surface of the work piece being patterned.