发明名称 FUNCTIONAL DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a functional device including a nanometer-size functional structure body, and a wiring means capable of suppressing connection resistance, when the functional structure body is connected to an external electrode and suppressing restriction given to structural designs of the various functional structure bodies to the minimum, and to provide its manufacturing method. SOLUTION: Electrodes 3, 4 arranged at intervals of 1-2μm, for example, are formed on a substrate 1 with an insulating layer 2 formed thereon. After liquid with the distribution of a metallic carbon nanotubes is stuck to a part between the electrodes, an AC voltage is applied on the part between the electrodes, so that the carbon nanotubes are arranged to perform cross-linking between the electrodes. A slightly larger voltage is applied to form a lacking part 8 in the carbon nanotube, so that the carbon nanotube is devided into carbon nanotubes 6, 7. Parts 9a, 9e to be enclosed of the functional structure body 9 are enclosed by the carbon nanotubes 6, 7, respectively, at openings of the carbon nanotubes 6, 7 facing the lacking part 8. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007103625(A) 申请公布日期 2007.04.19
申请号 JP20050290823 申请日期 2005.10.04
申请人 SONY CORP;SONY DEUTSCHE GMBH 发明人 MATSUI ERIKO;FORD WILLIAM;WESSELS JURINA;YASUDA AKIO;MARUYAMA RYUICHIRO;HATASAWA TAKENOBU
分类号 H01L29/06;B82B1/00;B82B3/00;H01C13/00;H01L21/822;H01L27/04;H01L29/41;H01L29/786 主分类号 H01L29/06
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