Method of etching silicon nitride,申请号GB19980009769-传众专利搜索

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发明名称	Method of etching silicon nitride
摘要
申请公布号	GB9809769(D0)	申请公布日期	1998.07.08
申请号	GB19980009769	申请日期	1998.05.07
申请人	UNITED MICROELECTRONICS CORPORATION	发明人
分类号	H01L21/302;H01L21/3065;H01L21/311;H01L21/762	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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