Lens for an electron microscope system and electron microscope system

摘要

The lens has a coil body arranged in a chamber between inner and outer pole pieces (111, 112), and a pole piece gap (119) formed between the inner and outer pole pieces. The outer pole piece is outwardly limited by a conical surface at a conical angle (alpha) along a Z-direction. A terminal electrode (114) is outwardly limited by the conical surface at another conical angle along the Z-direction. The terminal electrode is spatial-free magnetically coupled to the outer pole piece for reducing a magnetic field in an object plane. An independent claim is also included for an examining system for monitoring and manipulating an object to be examined, comprising an object holder.