| 摘要 |
PURPOSE: A method for preparing trichlorosilane is provided to suppress the production of impurities such as meal chloride and to overcome yield reduction problems due to the scattering of fine catalyst particles by omitting the use of a catalyst. CONSTITUTION: A method for preparing trichlorosilane includes a reaction of metal silicon powder, tetrachlorosilane, hydrogen, and fine metal silicon powder at a temperature between 400 and 800 degrees Celsius and at a pressure between atmospheric pressure and 40barr. The particle size of the fine metal silicon powder is smaller than the particle size of the metal silicon powder. The particle size of the metal silicon powder is between 10 and 1000um. The particle size of the fine metal silicon powder is lower than or equal to 40% of the particle size of the metal silicon powder. The iron content of the fine metal silicon powder is more than 20% of the iron content of the metal silicon powder. The copper content of the fine metal silicon powder is more than 20% of the copper content of the metal silicon powder. |
