发明名称 SUBSTRATE MOUNTING TABLE, RESIN PROTRUSION LAYER FORMATION METHOD ON SUBSTRATE MOUNTING SURFACE, AND RESIN PROTRUSION LAYER TRANSFER MEMBER
摘要 <P>PROBLEM TO BE SOLVED: To provide a resin protrusion layer formation method on a substrate mounting surface, capable of forming a resin protrusion layer on the substrate mounting surface without heating a substrate mounting table. <P>SOLUTION: The resin protrusion layer formation method includes: an adhesion step for adhering a resin protrusion layer 43 on a substrate mounting surface 13a, by depressing to the substrate mounting surface 13a a second adhesive agent layer 44 coated on the resin protrusion layer 43 of a resin protrusion layer transfer member 40, including a base material sheet, the resin protrusion layer 43 adhered to one surface of the base material sheet via a first adhesive agent layer, and the second adhesive agent layer 44 coated on the resin protrusion layer 43; and a base material sheet exfoliation step for exfoliating the base material sheet from the adhered resin protrusion layer 43. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012028622(A) 申请公布日期 2012.02.09
申请号 JP20100167121 申请日期 2010.07.26
申请人 TOKYO ELECTRON LTD 发明人 MINAMI MASAHITO;SASAKI YOSHIHIKO
分类号 H01L21/683 主分类号 H01L21/683
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