| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope mounted with an aberration corrector, capable of automatically performing the positioning of a convergence diaphragm to the optical axis center without depending on skill and experience of an operator. <P>SOLUTION: A scanning transmission electron microscope includes: an electron source; a convergent lens which converges electron beams emitted from the electron source; a deflector which scans the electron beams on a sample; an aberration correction device which corrects aberration of the electron beams; a convergence diaphragm which determines a convergence angle of the electron beams; and a detector which detects electrons transmitting or diffracting through the sample. In the scanning transmission electron microscope, information on contrast of a Ronchigram formed by the electron beams transmitting through the sample, and a position of the convergence diaphragm is determined on the basis of the information. <P>COPYRIGHT: (C)2012,JPO&INPIT |
