发明名称 |
DROPLET DISCHARGING DEVICE, MANUFACTURING METHOD OF ELECTROOPTICAL DEVICE, ELECTROOPTICAL DEVICE, AND ELECTRONIC EQUIPMENT |
摘要 |
PROBLEM TO BE SOLVED: To shorten a position recognition time of a reference mark even when the kind and size of a workpiece are different. SOLUTION: The droplet discharging device 1 has: a drawing means of making drawings on a plurality of kinds of workpieces W having pairs of reference marks M at different positions by moving an ink jet type function droplet discharging head 17 relatively in a main scanning direction; a workpiece stage 21 configured to set each fed workpiece W in a pre-aligned state and perform aligning operation byθcorrection for each workpiece W; an image recognizing means 80 which has a beltlike recognizable region 84 extending in a sub-scanning direction and image-recognizes a pair of reference marks M; an alignment control means which causes the workpiece stage 21 to perform aligning operation based upon a recognition result; and a material feeding/discharging means 70 which feeds and discharges the respective workpieces W to and from the workpiece stage 21, the material feeding/discharging means 70 feeding the respective workpieces W where the pair of reference marks M meet the recognizable region 84 in the main scanning direction. COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008227305(A) |
申请公布日期 |
2008.09.25 |
申请号 |
JP20070065726 |
申请日期 |
2007.03.14 |
申请人 |
SEIKO EPSON CORP |
发明人 |
KOJIMA KENJI |
分类号 |
H01L21/68;B05C5/00;B05C13/00;B65G49/06;G02B5/20;H01L51/50;H05B33/10 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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