发明名称 DROPLET DISCHARGING DEVICE, MANUFACTURING METHOD OF ELECTROOPTICAL DEVICE, ELECTROOPTICAL DEVICE, AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To shorten a position recognition time of a reference mark even when the kind and size of a workpiece are different. SOLUTION: The droplet discharging device 1 has: a drawing means of making drawings on a plurality of kinds of workpieces W having pairs of reference marks M at different positions by moving an ink jet type function droplet discharging head 17 relatively in a main scanning direction; a workpiece stage 21 configured to set each fed workpiece W in a pre-aligned state and perform aligning operation byθcorrection for each workpiece W; an image recognizing means 80 which has a beltlike recognizable region 84 extending in a sub-scanning direction and image-recognizes a pair of reference marks M; an alignment control means which causes the workpiece stage 21 to perform aligning operation based upon a recognition result; and a material feeding/discharging means 70 which feeds and discharges the respective workpieces W to and from the workpiece stage 21, the material feeding/discharging means 70 feeding the respective workpieces W where the pair of reference marks M meet the recognizable region 84 in the main scanning direction. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008227305(A) 申请公布日期 2008.09.25
申请号 JP20070065726 申请日期 2007.03.14
申请人 SEIKO EPSON CORP 发明人 KOJIMA KENJI
分类号 H01L21/68;B05C5/00;B05C13/00;B65G49/06;G02B5/20;H01L51/50;H05B33/10 主分类号 H01L21/68
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