发明名称 METHOD FOR THICKNESS-CALIBRATED BONDING BETWEEN AT LEAST TWO SUBSTRATES
摘要 <P>PROBLEM TO BE SOLVED: To propose a method for bonding between at least two substrates formed of a semiconductor material and to overcome the problem with the conventional techniques. <P>SOLUTION: A method for bonding between at least two substrates 1, 2 comprises deposition of at least one drop 8 of liquid adhesive on one of the two substrates and bringing the two substrates into contact causing spreading of the liquid adhesive followed by formation of a solidified adhesive layer between the two substrates. One of the two substrates is further provided, at the surface thereof, with at least one salient rim 3 in which at least one slit is formed, designed to remove the excess liquid adhesive when the two substrates are brought into contact. Finally, the volume of liquid adhesive deposited on one of the two substrates is greater than the volume of the bonding space delineated by the rim between the contacted substrates, and the deposited drop of liquid adhesive presents a strictly greater height H2 than the height H1 of the rim. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012028750(A) 申请公布日期 2012.02.09
申请号 JP20110134768 申请日期 2011.06.17
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES 发明人 ABDENASSER EMANI
分类号 H01L21/683;H01L21/02 主分类号 H01L21/683
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