APPARATUS FOR TREATING OBJECT TO BE TREATED

摘要

A processing apparatus for an object to be processed is provided to prevent an information reader from being contaminated or reading other processing information when the information reader reads processing information about an object to be processed in a closed space. A processing apparatus for an object to be processed comprises the following units. A housing(10) forms a first space(S1) and a second space(S2) separated by a wall inside the housing and a fixed-size opening. A first open-and-close member(50) is formed to open and close the opening(12a) on the wall. A first driving unit operates the first open-and-close member to open and close the opening. A non-faced communication between a process information unit(2) and the reader(20) is shut out when the opening is closed.