| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide techniques for increasing a percentage of light transmitted through an optical inspection system that operates in and near ultraviolet and far-ultraviolet electromagnetic wave spectra. <P>SOLUTION: Along with increasing the amount of light transmission, the techniques of the present invention also provide additional advantages such as reduction of ripple, increased ability to match inspection systems, and improving manufacturability. The techniques of the present invention involve using an auto-focus light source near the operational range of the inspection system and slightly raising the lower end of the operational range. <P>COPYRIGHT: (C)2012,JPO&INPIT |
