| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem in which: in the conventional three-dimensional coordinate measurement method based on a focal point method, enormous calculation time is needed for the evaluation of a focus degree and the selection of a measurement point in wide field measurement and the distribution of the measurement points becomes nonuniform as well since normally it is needed to evaluate the focus degree for all pixels of the image of a measurement object and select a high contrast area of a high focus degree as the measurement point. <P>SOLUTION: A focus adjusting mechanism for adjusting a focus by a fixed lateral magnification is disposed in an image space of an objective lens 2, and an imaging system is turned to a perspective projection system in which the front side focus F of the objective lens 2 is a projection center. The output light 14 of a laser source 10 is converted to a one-dimensional discrete divergent pencil-of-rays group, a bright line column is projected to the measurement object 1 through a translucent mirror 13. Arrangement in which a discrete divergence axis passes through the point of a mirror image by the translucent mirror 13 at the projection center at an apparent position viewed through the translucent mirror 13 is attained, the bright line column is image-formed at a fixed position on a two-dimensional image sensor of a solid-state imaging camera 9 regardless of a focus distance, and the focal point method is applied for the vicinity image of the measurement point set on the bright line column beforehand. <P>COPYRIGHT: (C)2012,JPO&INPIT |
