| 摘要 |
PURPOSE: A surface area improving nano-imprint stamp and a method for manufacturing the same are provided to minimize pitch sizes and to increase entire surface area by stacking nano-particles. CONSTITUTION: A method for manufacturing a surface area improving nano-imprint stamp includes the following: a plurality of first nano-particles(120) is arranged on a base substrate(110); a first pattern(10) is formed on a part of the base part without the first nano-particles; a plurality of second nano-particles(130) is arranged between the first nano-particles; the first nano-particles are eliminated to locate the second nano-particles on the first pattern; a second pattern(20) is formed on a part of the base substrate without the second nano-particles; and the second nano-particles is eliminated. |
