| 摘要 |
PROBLEM TO BE SOLVED: To allow effective utilization of factory space, by fully reducing the occupied area of a substrate lifting/transporting device 7. SOLUTION: A lifting guide frame 29 which extends vertically is provided upright near a first substrate transporting/processing device 3; the lifting guide 29 is provided with a lifting body 31 to allow ascending/descending; the lifting body 31 comprises a sucking pad 43 for holding a substrate W and is provided with a substrate-receiving member 35 for swinging around a horizontal axis; and the substrate-receiving member 35 switches to an upright attitude or toppled attitude due to the substrate-receiving member undergoing swinging motion. COPYRIGHT: (C)2010,JPO&INPIT
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