发明名称 |
SYSTEMS AND METHODS FOR HANDLING WAFERS |
摘要 |
<p>A system for handling wafers comprising: at least one unload station; at least one intermediate station designed to hold the wafers at an angle; a processing station; and a transfer device configured to move the wafers between the stations. The intermediate station may be configured to receive the wafers in a back-to-back arrangement. An apparatus for handling wafers comprising: on one side, a vacuum gripper configured to grip individual wafers; and, on the other side, a gravity gripper configured to support one or more wafers when positioned beneath the wafers and lifted. A method for handling wafers, comprising: unloading wafers; transferring the wafers to an intermediate station; transferring the wafers from the intermediate station to a processing station; treating the wafers; unloading the wafers from the processing station; and reloading the wafers in a carrier, wherein the wafers are unloaded, transferred and reloaded by a transfer device.</p> |
申请公布号 |
EP2415074(A1) |
申请公布日期 |
2012.02.08 |
申请号 |
EP20100757971 |
申请日期 |
2010.03.30 |
申请人 |
ATS AUTOMATION TOOLING SYSTEMS INC. |
发明人 |
RIVOLLIER, FREDERIC;CHUBB, RYAN |
分类号 |
H01L21/677;B65G49/07;H01L21/68;H01L21/687 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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