FUSE STRUCTURE AND MONITORING METHOD THEREOF

摘要

A fuse structure includes a substrate, a fuse element, and an auxiliary device. The fuse element is disposed on the substrate. The auxiliary device includes a source region and a drain region respectively disposed at two opposite sides of the fuse element. The auxiliary device is configured to monitor and diagnose the fuse element. The source region and the drain region are electrically isolated from the fuse element. A monitoring method of the fuse structure includes following steps. A drain voltage signal is applied to the drain region of the auxiliary device, a gate voltage signal is applied to the fuse element, and a signal from the source region is analyzed to diagnose a condition of the fuse element.

主权项

1. A fuse structure, comprising:
a substrate; a fuse element disposed on the substrate; and an auxiliary device, wherein the auxiliary device comprises a source region and a drain region disposed at two opposite sides of the fuse element, the auxiliary device is configured to monitor and diagnose the fuse element, and the source region and the drain region are electrically isolated from the fuse element.