SPUTTERING TARGET, Ag ALLOY FILM AND CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target capable of forming a silver based thin film achieving both of excellent corrosion resistance of an Ag alloy film used for a laminated transparent conductor and high light transmittance and excellent conductivity of the laminated transparent conductor.SOLUTION: The sputtering target includes 0.5-1.5 at% of Nb, 0.5-1.5 at% of at least one element selected from Pt and Pd and 90 at% or more of Ag as the remainder, and the total content of Nb, Pt and Pd is 1.0-2.5 at%.SELECTED DRAWING: None