摘要 |
PROBLEM TO BE SOLVED: To provide a production apparatus of carbon nanomaterials which can produce carbon nanomaterials efficiently in large quantities, and to provide a production method of carbon nanomaterials.SOLUTION: The production apparatus of carbon nanomaterials comprises a humidifying portion 31, which is disposed at a part of a carrier gas feed pipe 16 connecting a reaction chamber 61 for growing carbon nanomaterials 69 from catalyst particles which constitute a carbon nanomaterial production catalyst 68 and a carrier gas feed portion 13, and which humidifies the carrier gas with moisture which passed through a polymer membrane that can permeate water molecules.SELECTED DRAWING: Figure 1 |