发明名称 |
Photoirradiation type heat treatment apparatus |
摘要 |
To provide a photo-irradiation type heat treatment apparatus that eliminates the adverse influence of a light transmitting window on the temperature distribution of an article to be treated without losing the original function of a reflecting mirror a photo-irradiation type heat treatment apparatus in which heat treating of an article is performed by irradiating the article with light emitted from multiple filament lamps through a light transmitting window, by providing the apparatus with a reflecting mirror having an opening at its central area so that cooling air can pass therethrough and by providing an air permeable reflector so as to cover the opening in the reflecting mirror. |
申请公布号 |
US8110780(B2) |
申请公布日期 |
2012.02.07 |
申请号 |
US20080205014 |
申请日期 |
2008.09.05 |
申请人 |
SUZUKI SHINJI;NAKASHIMA AKINOBU;USHIODENKI KABUSHIKI KAISHA |
发明人 |
SUZUKI SHINJI;NAKASHIMA AKINOBU |
分类号 |
A21B1/00;F27D99/00;C23C16/00;F21V7/00;F21V7/20;F21Y103/00;H01L21/26;H01L21/31 |
主分类号 |
A21B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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